Influence of calibration parameters on extracting S-parameters of
microwave probe
Abstract
The microwave probe is an important measurement fixture for monolithic
microwave integrated circuit (MMIC). The S-parameter of the probe
significantly affects the accuracy of the chip test in the de-embedding
test. In this paper, a probe S-parameter extraction method is proposed
by considering the influence of all calibration parameters. The results
of different microwave probes and calibration kits are compared. The
effect of each calibration parameter on the S-parameter of the probe is
evaluated.