The effect of obtaining conditions on the structure and composition of
Сu-MoS2 coatings upon magnetron sputtering of composite targets
Abstract
Abstract. The surface morphology and phase composition of the coatings
obtained by magnetron sputtering of Cu-MoS2 composite targets have been
studied by X-ray diffraction, scanning electron microscopy and X-ray
spectral microanalysis. X-ray diffraction studies of coatings show
presence of two crystalline phases, namely Cu with face-centered cubic
lattice and CuMo6S8 with a rhombohedral lattice. Studies of the surface
morphology in Cu-CuMo6S8 coatings revealed two types of structures. One
of the structures is realized in the form of globular formations, while
the second is similar to the structure that had single-component Cu
coating. X-ray spectral microanalysis showed that globular formations
have higher Mo and S contents in comparison with other type of surface
structure. The ratio between these elements is close to that in СuMo6S8.
However, the Сu content is many times higher than the calculated amount
for this compound. This suggests that globular formations are
heterostructural where only one of the phases is CuMo6S8. Other possible
phases in globular formations should be based on copper. The total area
of globular formations in the coating increases with an increase in the
proportion of MoS2 in the composition of the Cu-MoS2 sputtered composite
target and strongly depends on the substrate potential. Key words:
magnetron sputtering, coatings, copper, molybdenum disulfide, structure,
composition, Chevrel phases.