FIGURE 3 The interface images between c-Si(n)/SiOx /SrF2/Al were observed using STEM-HAADF (A) A high-resolution STEM HAADF microscopy picture of the n-Si/SrF2/Al/ stack. (B) EDX mapping was performed with a 10 nm resolution for the signals of Al, Sr, F, and Si. (C) An EDX line scan was performed across the interfaces.