The investigations of the reactive magnetron depositing of the stoichiometric coatings “metal-metalloid” were done. The dependences between sputtering parameters of a target and processes of plasmochemical formation on the surface of sample “metal-metalloid” and formations of coatings of the appropriate structure were investigated. Experimental data on stoichiometric coatings AlN, Al 2 O 3 , TiN, TiO 2 is given. Features of reactive magnetron deposition and investigation results for obtaining of coatings with pregiven properties in particular for providing stability and controllability of coating deposition processes in time.
A set of programs for the numerical simulation of the diffusion decomposition processes was developed by using simulation methods, kinetic and particle method. The complex has been validated on the model system Ni-Al by the growth of-phase separations. The results on the evolution of the distribution function and other characteristics of the ensemble, which in the zero volume fraction approximation are asymptotically in good agreement with the theory and the experiment, have been obtained. The peculiarity of the created program complex is the possibility of its adaptation to the description of the decomposition of multicomponent multiphase systems.